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Thickness of Electrostatic Clamps

Electrostatic clamps are used for holding workpieces while they are being machined, for holding silicon wafers during electron beam microfabrication, etc. They comprise an insulated conducting plate maintained at a potential of several thousand volts covered with a thin insulating sheet. The workpiece or the wafer rests on the sheet and is grounded. It is advisable to apply a film of oil to the sheet to prevent sparking.

One particular type operates at 3000 volts and has a holding power of 2 atmospheres (2 x 10^5 pascals). If the insulator is Mylar (relative permittivity = 3.2), what is its thickness?

Solution Summary

The solution examines electrostatic clamps for holding workpieces while they are being machined.