Time for p-n junction formation
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Given a Gaussian drive-in and an error function deposit, find the time it takes to form a junction against a background of opposite conductivity type if Nb =10^15 /cm^3
Noi 10^21cm^3 junction depth at 1 micro meter
Deposit is at 950 degrees C for 15 mins
D @ 950˚C = 10^-14cm^2/s
Drive in is at 1050 degrees C
D @ 1050˚C = 10^-13 cm^2/s
N(x,t) = 2N0/pi √(D1t1/D2t2) exp(-x^2/4D2t2)
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Solution Summary
The expert calculates the time needed to form a p-n junction at a specified depth during implantation.
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