Fixed Oxide Charge
Consider an aluminum gate-silicon dioxide p type silicon MOS structure with tox=450 angstroms. The silicon doping is Na=2x10^11cm^-3 and the flat-band voltage is Vfb=-1.0V. Determine the fixed oxide charge Q'ss.
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V fb = Phi (metal-semiconductor) - (Qf/Cox) ----(1)
v fb = -1.0V
Phi(metal-semiconductor) --in this case it is Al-Si.
This quantity s basically the amount of work that has to be done in ...
Solution Summary
Consider an aluminum gate-silicon dioxide p type silicon MOS structure with tox=450 angstroms. The silicon doping is Na=2x10^11cm^-3 and the flat-band voltage is Vfb=-1.0V. Determine the fixed oxide charge Q'ss.
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